SEMI E139 - Specification for Recipe and Parameter Management (RaP)

The purpose of this specification is to specify the cooperative interaction between the factory information and control system (FICS) and the equipment to manage the specifications of equipment processing (for instance, equipment recipes).

Subordinate Standards:

SEMI E139.1-0310 — XML Schema for the RaP PDE

SEMI E139.2-1108 — SECS-II Protocol for Recipe and Parameter Management (RaP)

SEMI E139.3-1211 — XML/SOAP Binding for Recipe and Parameter Management

　

Referenced SEMI Standards

SEMI E4 — SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)

SEMI E5 — SEMI Equipment Communication Standard 2 Message Content (SECS-II)

SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)

SEMI E37 — High-Speed SECS Message Services (HSMS) Generic Services

SEMI E40 — Standard for Processing Management

SEMI E120 — Specification for the Common Equipment Module (CEM)

SEMI E121 — Guide for Style & Usage of XML for Semiconductor Manufacturing Applications

SEMI E139 — Recipe and Parameter Management (RaP)

SEMI E138 - Specification for XML Semiconductor Common Components

This Document is a central location for the definition of common XML elements that are not specific to a single standard, but common across multiple standards.

This Document defines the representation of Error, Data Types, Data Value Types, and Unit which are considered common components. The common components are used in association with other XML documents or schemas generated as part of the XML based SEMI Standard Interface Specifications.

Referenced SEMI Standards
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E87 — Specification for Carrier Management (CMS)
SEMI E121 — Guide for Style and Usage of XML for Semiconductor Manufacturing Applications
SEMI E125 — Specification for Equipment Self Description (EqSD)
SEMI E132 — Specification for Equipment Client Authentication and Authorization
SEMI E134 — Specification for Data Collection Management
SEMI E145 — Classification for Measurement Unit Symbols in XML

SEMI E134 - Specification for Data Collection Management

This specification describes a method for data acquisition consumers to request process and operational data from equipment to be communicated in an automated fashion by the equipment, or in an ad-hoc request from the consumer. It includes a mechanism for organizing related data into groups to make it more straightforward for enabling or disabling a large number of data sources and to allow consumers to organize related data into groups according to their purpose.

This specification provides a means to acquire event, exception, and trace data from semiconductor equipment through the use of a named data collection plan. This Specification defines what form a data collection plan takes, the meaning of its contents, and an interface for managing them that is to be supported by the equipment.

This specification defines the behavior associated with the execution of data collection plans in the form of finite state machines. The formats for data produced as a result of executing a data collection plan are also defined, as is the interface that must be supported by consumers of data collection plan output.

This specification defines a way for the equipment to notify consumers when the combination of activities on the equipment, including data acquisition, is causing the equipment to perform below supplier-defined criteria.

This specification defines a way for consumers to make ad-hoc on-demand requests for data from the equipment, outside of a data collection plan.

Subordinate Document:

SEMI E134.1-0414 - Specification for SOAP Binding of Data Collection Management (DCM)

Referenced SEMI Standards

SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E40 — Standard for Processing Management
SEMI E94 — Specification for Control Job Management
SEMI E120.1 — XML Schema for the Common Equipment Model
SEMI E121 — Guide for Style & Usage of XML for Semiconductor Manufacturing Applications
SEMI E125 — Specification for Equipment Self Description (EqSD)
SEMI E125.1 — Specification for SOAP Implementation of Equipment Self Description
SEMI E128 — Specification for XML Messaging
SEMI E132.1 — Specification for SOAP Implementation of Equipment Client Authentication and Authorization
SEMI E138 — XML Semiconductor Common Components

SEMI E132 - Specification for Equipment Client Authentication and Authorization

The authorization scheme specified in this Standard allows equipment vendor the flexibility to provide access control at any level of granularity, ranging from no access control restrictions, predefined role-based access control, to very fine-grained control.

This is a standard that applies to all semiconductor manufacturing equipment that requires authentication and authorization for its services. It does not apply to a communication that is governed by the SEMI E30 communication and control state models.

This Standard does not require data transmitted over an established session to be encrypted, encryption is only required as specified by the authentication protocol. It is assumed that the interface specified by this Standard will be operating in an environment where there are no malicious attacks such as inside a closed factory network.

Subordinate Documents:

SEMI E132.1-1015 - Specification for Soap Binding for Equipment Client Authentication and Authorization (ECA)

Referenced SEMI Standards

SEMI E30 — Specification for the Generic Model for Communications and Control of SEMI Equipment (GEM)

SEMI E128 — Specification for XML Message Structures

SEMI E128 - Specification for XML Message Structures

The XML Messaging Specification provides definitions of message headers needed for messages exchanged in an asynchronous or synchronous fashion. Synchronous message delivery is chosen when application communication requires message consumption and execution to be completed before a new message is allowed. Asynchronous messages are delivered independently without dependence on transport technology to correlate related messages. The rationale for choosing an asynchronous message delivery mechanism is based on the characteristics of the interaction between two software systems. Some of these reasons are:

·    Support for long-running Request/Reply interactions may not be practical in synchronous session-oriented communication.

·    Some messaging interactions require additional callback messages reporting on server activity which supplement the reply message.

·    Clients may wish to interleave requests and replies to manage parallel or overlapping activities in multiple concurrent messaging conversations.

Headers defined for asynchronous messaging may also support synchronous interactions that rely on transport sessions for identification and correlation of related messages. However, there may be benefits of using the message header elements specified here even in synchronous interactions. The message header elements provide self-describing information about messages that may be useful for debugging or tracking message traffic. Their use may also enable future migration to different message transports.

The XML Messaging Specification uses established, openly referenceable industry standards for XML messaging where possible. It only specifies extensions to existing industry standards when needed to meet the immediate requirements for messaging in a SEMI Standard application context. The intent of this Standard is not to replicate existing standards or offer competing specifications, but to align with and cite the usage of existing standards.

Referenced SEMI Standards
SEMI E120 — Specification for the Common Equipment Model (CEM)

SEMI E125 — Specification for Equipment Self Description (EqSD)

SEMI E132 — Specification for Equipment Client Authentication and Authorization

SEMI E134 — Specification for Data Collection Management

SEMI E127 - Specification for Integrated Measurement Module Communications: Concepts, Behavior, and Services (IMMC)

The purpose of integrated measurement (metrology or inspection) is to facilitate intra-equipment process monitoring through rapid access to measurement data, reduce material handling between process and measurement equipment, and the opportunity to increase process monitoring with minimal or no decrease in throughput. The benefits of integrated measurement also allow Advanced Process Control systems to use the results with reduced feedback lag time. The purpose of the IMMC specification is to provide an object-based specification of an Integrated Measurement Module together with a standard interface between an integrated measurement module and its control and data ports where these are commonly implemented by different suppliers. The interface allows access to the properties and services of specific objects. This will facilitate the effort needed for the integration of the module into a larger system. An additional purpose of this standard is to provide sufficient information through a combination of on-line services and interface documentation that an IMMC-compliant integrated measurement module may be integrated with multi-module equipment without requiring a software change in either the module or the equipment. This may require configuration changes made by the end-user through the equipment user interface where certain options are left to the module supplier.



Subordinate Standard:

SEMI E127.1-0308 - Specification for SECS-II Protocol for Integrated Measurement Module Communications (IMMC)

　

Referenced SEMI Standards

SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E30.5 — Specification for Metrology Specific Equipment Model (MSEM)
SEMI E32 — Material Movement Management (MMM)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E39.1 — SECS-II Protocol for Object Services Standard (OSS)
SEMI E40 — Standard for Processing Management
SEMI E41 — Exception Management (EM) Standard
SEMI E42 — Recipe Management Standard: Concepts, Behavior, and Message Services
SEMI E53 — Event Reporting
SEMI E58 — Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services
SEMI E90 — Specification for Substrate Tracking
SEMI E90.1 — Provisional Specification for SECS-II Protocol Substrate Tracking
SEMI E98 — Provisional Standard for the Object-Based Equipment Model (OBEM)
SEMI E116 — Provisional Specification for Equipment Performance Tracking
SEMI E120 — Provisional Specification for the Common Equipment Model (CEM)
SEMI E148 — Specification for Time Synchronization and Definition of the Clock Object
SEMI M20 — Specification for Establishing a Wafer Coordinate System

SEMI E125 - EQUIPMENT SELF DESCRIPTION

This specification describes a method for allowing equipment suppliers to provide a description of the variables, events, exceptions, and physical equipment configuration available from their equipment. With this information available for consumption by software systems, it can be used as a tool to aid the process of integrating equipment into a factory’s automation system.

In-Scope

This Document specifies the classes that suppliers are to use to describe essential data, events, and exceptions provided by their equipment. The specification only describes the information that is static in nature (i.e., information that does not change dynamically while the equipment is running). This document also specifies an interface that clients can use to access this information.

This Specification applies to all semiconductor manufacturing equipment that supports the data acquisition interface defined in the SEMI Specification for Data Collection Management.

Out of Scope

This specification does not define any new behavior required of the equipment other than that necessary for retrieving information describing equipment configuration, interfaces, and available data, and keeping this information current.

The details of any underlying concepts and behavioral models (e.g., carrier management, process/control job, etc.) that can be described by metadata are to be separately specified in a document dedicated to those concepts. Only the ability to describe the fact that a supplier has implemented such a concept and that a client can discover this implementation and any data it can produce is in scope for this Specification.

This specification does not require that the metadata provided by the equipment be directly human-readable. It is expected that applications will be written to organize and present this information to human users in a form that is easier for end-users to digest.

Subordinate Document:

SEMI E125.1-0414 - EQUIPMENT SELF DESCRIPTION(EqSD)의 SOAP 바인딩 규격


Referenced SEMI Standards
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E39 —Object Services Standard: Concept, Behavior, and Services
SEMI E120—Specification for the Common Equipment Model (CEM)
SEMI E120.1 — XML Schema for the Common Equipment Model
SEMI E121 — Guide for Style and Usage of XML for Semiconductor Manufacturing Applications
SEMI E128 — Specification for XML Messaging
SEMI E132.1 — Specification for SOAP Binding of Equipment Client Authentication and Authorization
SEMI E138 — XML Semiconductor Common Components
SEMI E145 — Classification for Measurement Unit Symbols in XML