SEMI E128 - Specification for XML Message Structures

The XML Messaging Specification provides definitions of message headers needed for messages exchanged in an asynchronous or synchronous fashion. Synchronous message delivery is chosen when application communication requires message consumption and execution to be completed before a new message is allowed. Asynchronous messages are delivered independently without dependence on transport technology to correlate related messages. The rationale for choosing an asynchronous message delivery mechanism is based on the characteristics of the interaction between two software systems. Some of these reasons are:

·    Support for long-running Request/Reply interactions may not be practical in synchronous session-oriented communication.

·    Some messaging interactions require additional callback messages reporting on server activity which supplement the reply message.

·    Clients may wish to interleave requests and replies to manage parallel or overlapping activities in multiple concurrent messaging conversations.

Headers defined for asynchronous messaging may also support synchronous interactions that rely on transport sessions for identification and correlation of related messages. However, there may be benefits of using the message header elements specified here even in synchronous interactions. The message header elements provide self-describing information about messages that may be useful for debugging or tracking message traffic. Their use may also enable future migration to different message transports.

The XML Messaging Specification uses established, openly referenceable industry standards for XML messaging where possible. It only specifies extensions to existing industry standards when needed to meet the immediate requirements for messaging in a SEMI Standard application context. The intent of this Standard is not to replicate existing standards or offer competing specifications, but to align with and cite the usage of existing standards.

Referenced SEMI Standards
SEMI E120 — Specification for the Common Equipment Model (CEM)

SEMI E125 — Specification for Equipment Self Description (EqSD)

SEMI E132 — Specification for Equipment Client Authentication and Authorization

SEMI E134 — Specification for Data Collection Management

SEMI E54.23 - Specification for Sensor/Actuator Network Communications for CC-Link IE Field Network

his Specification is part of the SEMI Sensor/Actuator Network (SAN) suite of Standards and defines a specific communications protocol based on the CC-LinkTM IE Field Network standard. This Network Communication Standard (NCS) taken together with the SEMI Sensor/Actuator Network Standard suite and the CC-Link IE Field Network standard completely and unambiguously defines an open standard providing an industry specific solution to off-the-shelf interoperability of networked devices in semiconductor manufacturing equipment.


CC-Link IE Field Network is a vendor independent, open device level network standard. Vendor independence and openness are guaranteed by the CC-Link Partner Association.

This Document specifies a SAN communications standard based on the CC-Link IE Field Network specification that is in compliance with SEMI E54.1. As such, it specifies the protocol, services and behavior that compliant intelligent devices must support in order to interchange information over this SAN in a method compatible with SEMI E39.

In conjunction with a SEMI Standard SAN Common Device Model (CDM) specification and one or more SEMI Standard-Specific Device Model (SDM) Specifications (e.g., for a mass flow controller), this Network Communication Standard (NCS) with the related CC-Link IE Field Network standard describe the data structures, interactions and behavior that are characteristic of the various devices on the network. This composite model forms a complete interoperability standard for communications among intelligent sensors, actuators and controllers in semiconductor manufacturing equipment.

　
Referenced SEMI Standards
SEMI E39 — Specification for Object Services: Concepts, Behavior, and Services
SEMI E54.1 — Specification for Sensor/Actuator Network Common Device Model
SEMI E54.3 — Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device
SEMI E54.10 — Specification for Sensor/Actuator Network Specific Device Model for an In Situ Particle Monitor Device
SEMI E54.11 — Specific Device Model for Endpoint Devices
SEMI E54.18 — Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pump Device