SEMI E139 - Specification for Recipe and Parameter Management (RaP)

The purpose of this specification is to specify the cooperative interaction between the factory information and control system (FICS) and the equipment to manage the specifications of equipment processing (for instance, equipment recipes).

Subordinate Standards:

SEMI E139.1-0310 — XML Schema for the RaP PDE

SEMI E139.2-1108 — SECS-II Protocol for Recipe and Parameter Management (RaP)

SEMI E139.3-1211 — XML/SOAP Binding for Recipe and Parameter Management

　

Referenced SEMI Standards

SEMI E4 — SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)

SEMI E5 — SEMI Equipment Communication Standard 2 Message Content (SECS-II)

SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)

SEMI E37 — High-Speed SECS Message Services (HSMS) Generic Services

SEMI E40 — Standard for Processing Management

SEMI E120 — Specification for the Common Equipment Module (CEM)

SEMI E121 — Guide for Style & Usage of XML for Semiconductor Manufacturing Applications

SEMI E139 — Recipe and Parameter Management (RaP)

SEMI E99 - Specification for Carrier ID Reader/Writer

The purpose of the Carrier ID Reader/Writer Functional Standard effort is to provide a common specification for concepts, behavior, and services (functions) provided by a Carrier ID Reader and a Carrier ID Reader/Writer to an upstream controller. A standard interface will increase the interchangeability of Carrier ID Reader/Writers so that users and equipment suppliers have a wider range of choices.

The Carrier ID Reader/Writer Interface Standard addresses the functional requirements for a generic Carrier ID Reader/Writer interface with an upstream controller.<br>This Specification includes required behavior and required communications for both a Carrier ID Reader and a Carrier ID Reader/Writer.<br>This The specification does not require, define, or prohibit asynchronous messages sent by the Carrier ID Reader or Reader/Writer.

Subordinate Standard

SEMI E99.1-0317 — Specification for SECS-I and SECS-II Protocol for Carrier ID Reader/Writer

　

Referenced SEMI Standards

SEMI E1.9 — Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers
SEMI E4 — SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E15 — Specification for Tool Load Port
SEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E47.1 — Mechanical Specification for FOUPS Used to Transport and Store 300 mm Wafers
SEMI E62 — Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS)
SEMI E87 — Specification for Carrier Management (CMS)