SEMI E139 - Specification for Recipe and Parameter Management (RaP)

The purpose of this specification is to specify the cooperative interaction between the factory information and control system (FICS) and the equipment to manage the specifications of equipment processing (for instance, equipment recipes).

Subordinate Standards:

SEMI E139.1-0310 — XML Schema for the RaP PDE

SEMI E139.2-1108 — SECS-II Protocol for Recipe and Parameter Management (RaP)

SEMI E139.3-1211 — XML/SOAP Binding for Recipe and Parameter Management

　

Referenced SEMI Standards

SEMI E4 — SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)

SEMI E5 — SEMI Equipment Communication Standard 2 Message Content (SECS-II)

SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)

SEMI E37 — High-Speed SECS Message Services (HSMS) Generic Services

SEMI E40 — Standard for Processing Management

SEMI E120 — Specification for the Common Equipment Module (CEM)

SEMI E121 — Guide for Style & Usage of XML for Semiconductor Manufacturing Applications

SEMI E139 — Recipe and Parameter Management (RaP)

SEMI E127 - Specification for Integrated Measurement Module Communications: Concepts, Behavior, and Services (IMMC)

The purpose of integrated measurement (metrology or inspection) is to facilitate intra-equipment process monitoring through rapid access to measurement data, reduce material handling between process and measurement equipment, and the opportunity to increase process monitoring with minimal or no decrease in throughput. The benefits of integrated measurement also allow Advanced Process Control systems to use the results with reduced feedback lag time. The purpose of the IMMC specification is to provide an object-based specification of an Integrated Measurement Module together with a standard interface between an integrated measurement module and its control and data ports where these are commonly implemented by different suppliers. The interface allows access to the properties and services of specific objects. This will facilitate the effort needed for the integration of the module into a larger system. An additional purpose of this standard is to provide sufficient information through a combination of on-line services and interface documentation that an IMMC-compliant integrated measurement module may be integrated with multi-module equipment without requiring a software change in either the module or the equipment. This may require configuration changes made by the end-user through the equipment user interface where certain options are left to the module supplier.



Subordinate Standard:

SEMI E127.1-0308 - Specification for SECS-II Protocol for Integrated Measurement Module Communications (IMMC)

　

Referenced SEMI Standards

SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E30.5 — Specification for Metrology Specific Equipment Model (MSEM)
SEMI E32 — Material Movement Management (MMM)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E39.1 — SECS-II Protocol for Object Services Standard (OSS)
SEMI E40 — Standard for Processing Management
SEMI E41 — Exception Management (EM) Standard
SEMI E42 — Recipe Management Standard: Concepts, Behavior, and Message Services
SEMI E53 — Event Reporting
SEMI E58 — Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services
SEMI E90 — Specification for Substrate Tracking
SEMI E90.1 — Provisional Specification for SECS-II Protocol Substrate Tracking
SEMI E98 — Provisional Standard for the Object-Based Equipment Model (OBEM)
SEMI E116 — Provisional Specification for Equipment Performance Tracking
SEMI E120 — Provisional Specification for the Common Equipment Model (CEM)
SEMI E148 — Specification for Time Synchronization and Definition of the Clock Object
SEMI M20 — Specification for Establishing a Wafer Coordinate System

SEMI E99 - Specification for Carrier ID Reader/Writer

The purpose of the Carrier ID Reader/Writer Functional Standard effort is to provide a common specification for concepts, behavior, and services (functions) provided by a Carrier ID Reader and a Carrier ID Reader/Writer to an upstream controller. A standard interface will increase the interchangeability of Carrier ID Reader/Writers so that users and equipment suppliers have a wider range of choices.

The Carrier ID Reader/Writer Interface Standard addresses the functional requirements for a generic Carrier ID Reader/Writer interface with an upstream controller.<br>This Specification includes required behavior and required communications for both a Carrier ID Reader and a Carrier ID Reader/Writer.<br>This The specification does not require, define, or prohibit asynchronous messages sent by the Carrier ID Reader or Reader/Writer.

Subordinate Standard

SEMI E99.1-0317 — Specification for SECS-I and SECS-II Protocol for Carrier ID Reader/Writer

　

Referenced SEMI Standards

SEMI E1.9 — Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers
SEMI E4 — SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E15 — Specification for Tool Load Port
SEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E47.1 — Mechanical Specification for FOUPS Used to Transport and Store 300 mm Wafers
SEMI E62 — Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS)
SEMI E87 — Specification for Carrier Management (CMS)

SEMI E94 - Specification for Control Job Management

This Specification describes equipment provided services to the factory that supports a high level of factory automation. These services provide capabilities for the host to coordinate processing and disposition of materials on production equipment.

This Specification may be applied to equipment that is compliant to SEMI E30 (GEM).

Subordinate Standard:

SEMI E94.1-0819 - Specification for SECS-II Protocol for Control Job Management (CJM)

Referenced SEMI Standards

SEMI E30 — Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E39 — Specification for Object Services Standard: Concepts, Behavior, and Services
SEMI E40 — Specification for Processing Management
SEMI E87 — Specification for Carrier Management (CMS)
SEMI E90 — Specification for Substrate Tracking

SEMI E90 - Specification for Substrate Tracking

The purpose of this Standard is to provide the standard services of equipment to track substrates (manufactured product) in manufacturing equipment. This Standard defines the concepts and behaviors for the information management of substrates, as well as the messages/services.

Essentially, information about substrates must be managed by the factory system, while the equipment is required to provide the services for the substrate information management. This Standard addresses the requirement for the equipment services to manage information of substrates that reside in the equipment.

The scope of this Standard is to define the information services of equipment that can be requested by the user. To clarify the required services, the concepts and behaviors of the substrate, the substrate location, the batch, and the batch location are defined.

This Standard is applicable to any manufacturing equipment that handles substrates. To implement these services, the equipment and factory system must be integrated by means of a communication link.

Subordinate Standard:

SEMI E90.1-0312 - Specification for SECS-II Protocol Substrate Tracking

Referenced SEMI Standards
SEMI E30 — Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E39 — Specification for Object Services: Concepts, Behavior, and Services
SEMI E87 — Specification for Carrier Management (CMS)

SEMI E42 - Recipe Management Standard: Concepts, Behavior, and Message Services

E This standard was editorially modified in September 1999 to conform to its non-provisional status. Changes were made to Section 1.2.

This standard defines the concepts required for the management of recipes, the operations or behavior provided by the Recipe Management Standard (RMS), and the messages through which services are provided through an interface between the provider and the user of these services. The purpose of this standard is twofold: to enable applications software to be developed that can assume the existence of standard concepts, behaviors, and message services that collectively form Recipe Management and that take advantage of them; and to enable the software to be developed to offer the Recipe Management capabilities.

Subordinate Standard:

SEMI E42.1-0704 — Standard for SECS-II Protocol for Recipe Management Standard (RMS)

Referenced SEMI Standards
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E10 — Standard for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM)
SEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E42 — Recipe Management Standard: Concepts, Behavior, and Message Services
SEMI E53 — Event Reporting