The purpose of this Standard is to provide the standard services of equipment to track substrates (manufactured product) in manufacturing equipment. This Standard defines the concepts and behaviors for the information management of substrates, as well as the messages/services.
Essentially, information about substrates must be managed by the factory system, while the equipment is required to provide the services for the substrate information management. This Standard addresses the requirement for the equipment services to manage information of substrates that reside in the equipment.
The scope of this Standard is to define the information services of equipment that can be requested by the user. To clarify the required services, the concepts and behaviors of the substrate, the substrate location, the batch, and the batch location are defined.
This Standard is applicable to any manufacturing equipment that handles substrates. To implement these services, the equipment and factory system must be integrated by means of a communication link.
Subordinate Standard:
SEMI E90.1-0312 - Specification for SECS-II Protocol Substrate Tracking
Referenced SEMI Standards
SEMI E30 — Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E39 — Specification for Object Services: Concepts, Behavior, and Services
SEMI E87 — Specification for Carrier Management (CMS)
Essentially, information about substrates must be managed by the factory system, while the equipment is required to provide the services for the substrate information management. This Standard addresses the requirement for the equipment services to manage information of substrates that reside in the equipment.
The scope of this Standard is to define the information services of equipment that can be requested by the user. To clarify the required services, the concepts and behaviors of the substrate, the substrate location, the batch, and the batch location are defined.
This Standard is applicable to any manufacturing equipment that handles substrates. To implement these services, the equipment and factory system must be integrated by means of a communication link.
Subordinate Standard:
SEMI E90.1-0312 - Specification for SECS-II Protocol Substrate Tracking
Referenced SEMI Standards
SEMI E30 — Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E39 — Specification for Object Services: Concepts, Behavior, and Services
SEMI E87 — Specification for Carrier Management (CMS)
