This Specification describes equipment provided services to the factory that supports a high level of factory automation. These services provide capabilities for the host to coordinate processing and disposition of materials on production equipment.
This Specification may be applied to equipment that is compliant to SEMI E30 (GEM).
Subordinate Standard:
SEMI E94.1-0819 - Specification for SECS-II Protocol for Control Job Management (CJM)
Referenced SEMI Standards
SEMI E30 — Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E39 — Specification for Object Services Standard: Concepts, Behavior, and Services
SEMI E40 — Specification for Processing Management
SEMI E87 — Specification for Carrier Management (CMS)
SEMI E90 — Specification for Substrate Tracking
This Specification may be applied to equipment that is compliant to SEMI E30 (GEM).
Subordinate Standard:
SEMI E94.1-0819 - Specification for SECS-II Protocol for Control Job Management (CJM)
Referenced SEMI Standards
SEMI E30 — Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E39 — Specification for Object Services Standard: Concepts, Behavior, and Services
SEMI E40 — Specification for Processing Management
SEMI E87 — Specification for Carrier Management (CMS)
SEMI E90 — Specification for Substrate Tracking
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