This Specification is part of a suite of Standards that specify the implementation of SEMI Standards for the Sensor/Actuator Network. The specific purpose of this specification is to describe a network-independent application model of a generic sensor device measuring one or more phenomena on a piece of semiconductor manufacturing equipment and communicating over a sensor/actuator communication network. Oftentimes such sensors are added onto the equipment as they might provide a capability that is not provided with the current equipment configuration.
This document describes a specific device structure and behavior of a generic equipment networked sensor. This could include a sensor added onto the equipment that communicates over a sensor/actuator communication network. It could also include a sensor that is part of the default configuration of the equipment, communicating over a sensor/actuator communication network.
This Document is applicable to sensors that are regarded as data producers only. A configuration or control of the sensor device (e.g., described by a third entity) is outside the scope of this Standard.
This document does not define terms that have been defined already in other referenced documents.
Referenced SEMI Standards
SEMI E39 — Object Services Standard
SEMI E54 — Specification for Sensor/Actuator Network
SEMI E54.1 — Specification for Sensor/Actuator Network Common Device Model
SEMI E90 — Specification for Substrate Tracking
This document describes a specific device structure and behavior of a generic equipment networked sensor. This could include a sensor added onto the equipment that communicates over a sensor/actuator communication network. It could also include a sensor that is part of the default configuration of the equipment, communicating over a sensor/actuator communication network.
This Document is applicable to sensors that are regarded as data producers only. A configuration or control of the sensor device (e.g., described by a third entity) is outside the scope of this Standard.
This document does not define terms that have been defined already in other referenced documents.
Referenced SEMI Standards
SEMI E39 — Object Services Standard
SEMI E54 — Specification for Sensor/Actuator Network
SEMI E54.1 — Specification for Sensor/Actuator Network Common Device Model
SEMI E90 — Specification for Substrate Tracking
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