SEMI E118 - Specification for Wafer ID Reader Communication Interface -- The Wafer ID Reader Functional Standard: Concepts, Behavior and Service

E This standard was editorially modified in February 2005 to correct errors in Figure R2-1.

NOTICE: The designation of SEMI E118 was updated during the 1104 publishing cycle to reflect the creation of SEMI E118.1.

The purpose of the Wafer ID Reader Functional Standard is to provide a common specification for concepts, behavior, and services (functions) provided by a Wafer ID Reader to an upstream controller. A standard interface will increase the interchange-ability of Wafer ID Readers so that users and equipment suppliers have a wider range of choices.

Subordinate Standard:
SEMI E118.1-1104 - Specification for SECS-I and SECS-II Protocol for Wafer ID Reader Communication Interface Standards

Referenced SEMI Standards

SEMI E4 — SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E15 — Specification for Tool Load Port
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E47.1 — Provisional Mechanical Specification for Boxes and Pods Used to Transport and Store 300 mm Wafers
SEMI E62 — Provisional Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS)
SEMI E87 — Specification for Carrier Management (CMS)
SEMI E90 — Specification for Substrate Tracking
SEMI E99 — The Carrier ID Reader/Writer Functional Standard: Specification of Concepts, Behaviors, and Services
SEMI E101 — Provisional Guide for EFEM Functional Structure Model
SEMI T7 — Specification for Back Surface Marking of Double-Side Polished Wafers With a Two-Dimensional Matrix Code Symbol