SEMI E134 - Specification for Data Collection Management

This specification describes a method for data acquisition consumers to request process and operational data from equipment to be communicated in an automated fashion by the equipment, or in an ad-hoc request from the consumer. It includes a mechanism for organizing related data into groups to make it more straightforward for enabling or disabling a large number of data sources and to allow consumers to organize related data into groups according to their purpose.

This specification provides a means to acquire event, exception, and trace data from semiconductor equipment through the use of a named data collection plan. This Specification defines what form a data collection plan takes, the meaning of its contents, and an interface for managing them that is to be supported by the equipment.

This specification defines the behavior associated with the execution of data collection plans in the form of finite state machines. The formats for data produced as a result of executing a data collection plan are also defined, as is the interface that must be supported by consumers of data collection plan output.

This specification defines a way for the equipment to notify consumers when the combination of activities on the equipment, including data acquisition, is causing the equipment to perform below supplier-defined criteria.

This specification defines a way for consumers to make ad-hoc on-demand requests for data from the equipment, outside of a data collection plan.

Subordinate Document:

SEMI E134.1-0414 - Specification for SOAP Binding of Data Collection Management (DCM)

Referenced SEMI Standards

SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E40 — Standard for Processing Management
SEMI E94 — Specification for Control Job Management
SEMI E120.1 — XML Schema for the Common Equipment Model
SEMI E121 — Guide for Style & Usage of XML for Semiconductor Manufacturing Applications
SEMI E125 — Specification for Equipment Self Description (EqSD)
SEMI E125.1 — Specification for SOAP Implementation of Equipment Self Description
SEMI E128 — Specification for XML Messaging
SEMI E132.1 — Specification for SOAP Implementation of Equipment Client Authentication and Authorization
SEMI E138 — XML Semiconductor Common Components

SEMI E36 - Semiconductor Equipment Manufacturing Information Tagging Specification

The purpose of Semiconductor Equipment Manufacturing Information Tagging is to define a markup philosophy, a markup framework, and an information markup which is rich enough to facilitate: electronic interchange and distribution of information; quality hardcopy printing and screen display of information consistent high-precision online searching and reuse and repurposing of information for such applications as integrating source material into training material and online support applications. The intent of this document is to create an information interchange specification, not an authoring specification or an electronic presentation specification. Semiconductor Equipment Manufacturing Information Tagging will define the markup necessary for exchanging documents electronically, for facilitating retrieval of information content, and for validating information interchanges.


Subordinate Standard:

SEMI E36.1-0704 - Specification for the Semiconductor Equipment Manufacturing Information Tagging Standard E36

SEMI D27 - Guide for Flat Panel Display Equipment Communication Interfaces

This is a guide for implementing equipment communication features for successful integration and automation in a flat panel display manufacturing facility.

Referenced SEMI Standards:

SEMI E4 — SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)


SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)


SEMI E23 — Specification for Cassette Transfer Parallel I/O Interface


SEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)


SEMI E37 — High-Speed SECS Message Services (HSMS), Generic Services


SEMI E37.1 — High-Speed SECS Message Services, Single-Session Mode (HSMS-SS)