This is a guide for implementing equipment communication features for successful integration and automation in a flat panel display manufacturing facility.
Referenced SEMI Standards:
SEMI E4 — SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E23 — Specification for Cassette Transfer Parallel I/O Interface
SEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)
SEMI E37 — High-Speed SECS Message Services (HSMS), Generic Services
SEMI E37.1 — High-Speed SECS Message Services, Single-Session Mode (HSMS-SS)
Referenced SEMI Standards:
SEMI E4 — SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E23 — Specification for Cassette Transfer Parallel I/O Interface
SEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)
SEMI E37 — High-Speed SECS Message Services (HSMS), Generic Services
SEMI E37.1 — High-Speed SECS Message Services, Single-Session Mode (HSMS-SS)
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