SEMI E37 - Specification for High-Speed SECS Message Services (HSMS) Generic Services

High-Speed SECS Message Services (HSMS) provides a means for independent manufacturers to produce implementations that can be connected and interoperate without requiring specific knowledge of one another.

HSMS is intended as an alternative to SEMI E4 (SECS-I) for applications where higher speed communication is needed or when a simple point-to-point topology is insufficient. SEMI E4 (SECS-I) can still be used in applications where these and other attributes of HSMS are not required.

HSMS is also intended as an alternative to SEMI E13 (SECS Message Services) for applications where TCP/IP is preferred over OSI.

It is intended that HSMS be supplemented by subsidiary standards which further specify details of its use or impose restrictions on its use in particular application domains.

HSMS defines a communication interface suitable for the exchange of messages between computers in a semiconductor factory.


Subordinate Standards:

SEMI E37.1-0819 — Specification for High-Speed SECS Message Services Single Selected-Session Mode (HSMS-SS)

SEMI E37.2-95 (Withdrawn 1109) — High-Speed SECS Message Services General Session (HSMS-GS)

SEMI D27 - Guide for Flat Panel Display Equipment Communication Interfaces

This is a guide for implementing equipment communication features for successful integration and automation in a flat panel display manufacturing facility.

Referenced SEMI Standards:

SEMI E4 — SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)


SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)


SEMI E23 — Specification for Cassette Transfer Parallel I/O Interface


SEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)


SEMI E37 — High-Speed SECS Message Services (HSMS), Generic Services


SEMI E37.1 — High-Speed SECS Message Services, Single-Session Mode (HSMS-SS)