SEMI E134 - Specification for Data Collection Management

This specification describes a method for data acquisition consumers to request process and operational data from equipment to be communicated in an automated fashion by the equipment, or in an ad-hoc request from the consumer. It includes a mechanism for organizing related data into groups to make it more straightforward for enabling or disabling a large number of data sources and to allow consumers to organize related data into groups according to their purpose.

This specification provides a means to acquire event, exception, and trace data from semiconductor equipment through the use of a named data collection plan. This Specification defines what form a data collection plan takes, the meaning of its contents, and an interface for managing them that is to be supported by the equipment.

This specification defines the behavior associated with the execution of data collection plans in the form of finite state machines. The formats for data produced as a result of executing a data collection plan are also defined, as is the interface that must be supported by consumers of data collection plan output.

This specification defines a way for the equipment to notify consumers when the combination of activities on the equipment, including data acquisition, is causing the equipment to perform below supplier-defined criteria.

This specification defines a way for consumers to make ad-hoc on-demand requests for data from the equipment, outside of a data collection plan.

Subordinate Document:

SEMI E134.1-0414 - Specification for SOAP Binding of Data Collection Management (DCM)

Referenced SEMI Standards

SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E40 — Standard for Processing Management
SEMI E94 — Specification for Control Job Management
SEMI E120.1 — XML Schema for the Common Equipment Model
SEMI E121 — Guide for Style & Usage of XML for Semiconductor Manufacturing Applications
SEMI E125 — Specification for Equipment Self Description (EqSD)
SEMI E125.1 — Specification for SOAP Implementation of Equipment Self Description
SEMI E128 — Specification for XML Messaging
SEMI E132.1 — Specification for SOAP Implementation of Equipment Client Authentication and Authorization
SEMI E138 — XML Semiconductor Common Components