SEMI E147 - Guide for Equipment Data Acquisition (EDA)

E This standard was editorially modified in September 2007 to remove duplicate sections. Changes were made to § 6.

This guidance document provides additional information about the Equipment Data Acquisition (EDA) SEMI Standards suite, explains the relationship among those standards, and presents basic concepts for implementation to ensure the EDA specifications are properly applied.

Referenced SEMI Standards

SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)

SEMI E39 — Object Services Standard: Concepts, Behavior, and Services

SEMI E40 — Standard for Processing Management

SEMI E87 — Specification for Carrier Management (CMS)

SEMI E90 — Specification for Substrate Tracking

SEMI E94 — Specification for Control Job Management

SEMI E116 — Specification for Equipment Performance Tracking (EPT)

SEMI E120 — Specification for the Common Equipment Model (CEM)

SEMI E125 — Specification for Equipment Self Description (EqSD)

SEMI E132 — Specification for Equipment Client Authentication and Authorization

SEMI E134 — Specification for Data Collection Management (DCM)

SEMI E138 — XML Semiconductor Common Components