SEMI E132 - Specification for Equipment Client Authentication and Authorization

The authorization scheme specified in this Standard allows equipment vendor the flexibility to provide access control at any level of granularity, ranging from no access control restrictions, predefined role-based access control, to very fine-grained control.

This is a standard that applies to all semiconductor manufacturing equipment that requires authentication and authorization for its services. It does not apply to a communication that is governed by the SEMI E30 communication and control state models.

This Standard does not require data transmitted over an established session to be encrypted, encryption is only required as specified by the authentication protocol. It is assumed that the interface specified by this Standard will be operating in an environment where there are no malicious attacks such as inside a closed factory network.

Subordinate Documents:

SEMI E132.1-1015 - Specification for Soap Binding for Equipment Client Authentication and Authorization (ECA)

Referenced SEMI Standards

SEMI E30 — Specification for the Generic Model for Communications and Control of SEMI Equipment (GEM)

SEMI E128 — Specification for XML Message Structures

SEMI E4 - Specification for SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)

This Standard provides a means for independent manufacturers to produce equipment and/or hosts that can be connected without requiring specific knowledge of each other.

The SECS-I Standard defines a communication interface suitable for the exchange of messages between semiconductor processing equipment and a host. Semiconductor processing equipment includes equipment intended for wafer manufacturing, wafer processing, process measuring, assembly, and packaging. A host is a computer or network of computers which exchange information with the equipment to accomplish manufacturing. This Standard includes the description of the physical connector, signal levels, data rate, and logical protocols required to exchange messages between the host and equipment over a serial point-to-point data path. This Standard does not define the data contained within a message. The meaning of messages must be determined through some message content standards such as SEMI E5, Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II).

　
Referenced SEMI Standards
SEMI E5 — Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E6 — Guide for Semiconductor Equipment Installation Documentation