SEMI E107 - Specification of Electric Failure LInk Data Format for Yield Management System

The objective of this Document is the standardization of the specific data format passed from the test equipment to the Yield Management System. The Yield Management System is a kind of data server for detail test data and geometrical defect data of patterns on a wafer as described in the Terminology section of this Document.

This Document assumes a Yield Management System in which test equipment electrical failure information is managed and analyzed in an integrated manner. Examples of test equipment failure information include bit map data, bin data, and inspection information obtained by devices such as wafer inspection equipment and review tools. Standardization of the data file format helps to reduce the development burden on customers and related vendors.

This document specifies the data file format for transferring from test equipment to a Yield Management System.

This document is an extension of the general map data item standard; that is, SEMI G81, and the general map data format document, currently under development. This Document does not redefine the general specification.

The scope of this Document is just defining data items and their formats. Data file creation methods, data creating environments and file naming conventions are outside of the scope of this document. Also, communication protocols to transfer the data are beyond the scope of this document.

Referenced SEMI Standards
SEMI E5 — SEMI Equipment Communication Standard 2 Message Content (SECS-II)
SEMI E30.1 — Inspection and Review Specific Equipment Model (ISEM)
SEMI G81 — Specification for Map Data Items
SEMI G85 — Specification for Map Data Format

SEMI E99 - Specification for Carrier ID Reader/Writer

The purpose of the Carrier ID Reader/Writer Functional Standard effort is to provide a common specification for concepts, behavior, and services (functions) provided by a Carrier ID Reader and a Carrier ID Reader/Writer to an upstream controller. A standard interface will increase the interchangeability of Carrier ID Reader/Writers so that users and equipment suppliers have a wider range of choices.

The Carrier ID Reader/Writer Interface Standard addresses the functional requirements for a generic Carrier ID Reader/Writer interface with an upstream controller.<br>This Specification includes required behavior and required communications for both a Carrier ID Reader and a Carrier ID Reader/Writer.<br>This The specification does not require, define, or prohibit asynchronous messages sent by the Carrier ID Reader or Reader/Writer.

Subordinate Standard

SEMI E99.1-0317 — Specification for SECS-I and SECS-II Protocol for Carrier ID Reader/Writer

　

Referenced SEMI Standards

SEMI E1.9 — Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers
SEMI E4 — SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E15 — Specification for Tool Load Port
SEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E47.1 — Mechanical Specification for FOUPS Used to Transport and Store 300 mm Wafers
SEMI E62 — Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS)
SEMI E87 — Specification for Carrier Management (CMS)

SEMI E94 - Specification for Control Job Management

This Specification describes equipment provided services to the factory that supports a high level of factory automation. These services provide capabilities for the host to coordinate processing and disposition of materials on production equipment.

This Specification may be applied to equipment that is compliant to SEMI E30 (GEM).

Subordinate Standard:

SEMI E94.1-0819 - Specification for SECS-II Protocol for Control Job Management (CJM)

Referenced SEMI Standards

SEMI E30 — Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E39 — Specification for Object Services Standard: Concepts, Behavior, and Services
SEMI E40 — Specification for Processing Management
SEMI E87 — Specification for Carrier Management (CMS)
SEMI E90 — Specification for Substrate Tracking

SEMI E90 - Specification for Substrate Tracking

The purpose of this Standard is to provide the standard services of equipment to track substrates (manufactured product) in manufacturing equipment. This Standard defines the concepts and behaviors for the information management of substrates, as well as the messages/services.

Essentially, information about substrates must be managed by the factory system, while the equipment is required to provide the services for the substrate information management. This Standard addresses the requirement for the equipment services to manage information of substrates that reside in the equipment.

The scope of this Standard is to define the information services of equipment that can be requested by the user. To clarify the required services, the concepts and behaviors of the substrate, the substrate location, the batch, and the batch location are defined.

This Standard is applicable to any manufacturing equipment that handles substrates. To implement these services, the equipment and factory system must be integrated by means of a communication link.

Subordinate Standard:

SEMI E90.1-0312 - Specification for SECS-II Protocol Substrate Tracking

Referenced SEMI Standards
SEMI E30 — Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E39 — Specification for Object Services: Concepts, Behavior, and Services
SEMI E87 — Specification for Carrier Management (CMS)

SEMI E87 - Specification for Carrier Management (CMS)

The scope of this document is to define standards that facilitate the host’s knowledge and role in automated and manual carrier transfers, as well as internal buffer equipment carrier transfers. Specifically, this Document provides state models and scenarios that define the host interaction with the equipment for the following:

Carrier transfer between AMHS vehicles and production equipment load ports.
Carrier transfers to/from production equipment internal buffer space.
Equipment and load port access mode switching.
Carrier to load port association.
Carriere verification and Carrier slot map verification.

Subordinate Standard:

SEMI E87.1-0619E - Specification for SECS-II Protocol for Carrier Management (CMS)

Referenced SEMI Standards
SEMI E15 — Specification for Tool Load Port
SEMI E15.1 — Specification for 300 mm Tool Load Port
SEMI E30 — Specification for Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E39 — Specification for SECS-II Protocol for Object Services (OSS)
SEMI E62 — Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS)
SEMI E84 — Specification for Enhanced Carrier Handoff Parallel I/O Interface
SEMI E90 — Specification for Substrate Tracking
SEMI E99 — Specification for Carrier ID Reader/Writer

SEMI E54.24 - Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Networked Sensor (GENsen)

This Specification is part of a suite of Standards that specify the implementation of SEMI Standards for the Sensor/Actuator Network. The specific purpose of this specification is to describe a network-independent application model of a generic sensor device measuring one or more phenomena on a piece of semiconductor manufacturing equipment and communicating over a sensor/actuator communication network. Oftentimes such sensors are added onto the equipment as they might provide a capability that is not provided with the current equipment configuration.

This document describes a specific device structure and behavior of a generic equipment networked sensor. This could include a sensor added onto the equipment that communicates over a sensor/actuator communication network. It could also include a sensor that is part of the default configuration of the equipment, communicating over a sensor/actuator communication network.

This Document is applicable to sensors that are regarded as data producers only. A configuration or control of the sensor device (e.g., described by a third entity) is outside the scope of this Standard.

This document does not define terms that have been defined already in other referenced documents.

Referenced SEMI Standards
SEMI E39 — Object Services Standard
SEMI E54 — Specification for Sensor/Actuator Network
SEMI E54.1 — Specification for Sensor/Actuator Network Common Device Model
SEMI E90 — Specification for Substrate Tracking

SEMI E54.23 - Specification for Sensor/Actuator Network Communications for CC-Link IE Field Network

his Specification is part of the SEMI Sensor/Actuator Network (SAN) suite of Standards and defines a specific communications protocol based on the CC-LinkTM IE Field Network standard. This Network Communication Standard (NCS) taken together with the SEMI Sensor/Actuator Network Standard suite and the CC-Link IE Field Network standard completely and unambiguously defines an open standard providing an industry specific solution to off-the-shelf interoperability of networked devices in semiconductor manufacturing equipment.


CC-Link IE Field Network is a vendor independent, open device level network standard. Vendor independence and openness are guaranteed by the CC-Link Partner Association.

This Document specifies a SAN communications standard based on the CC-Link IE Field Network specification that is in compliance with SEMI E54.1. As such, it specifies the protocol, services and behavior that compliant intelligent devices must support in order to interchange information over this SAN in a method compatible with SEMI E39.

In conjunction with a SEMI Standard SAN Common Device Model (CDM) specification and one or more SEMI Standard-Specific Device Model (SDM) Specifications (e.g., for a mass flow controller), this Network Communication Standard (NCS) with the related CC-Link IE Field Network standard describe the data structures, interactions and behavior that are characteristic of the various devices on the network. This composite model forms a complete interoperability standard for communications among intelligent sensors, actuators and controllers in semiconductor manufacturing equipment.

　
Referenced SEMI Standards
SEMI E39 — Specification for Object Services: Concepts, Behavior, and Services
SEMI E54.1 — Specification for Sensor/Actuator Network Common Device Model
SEMI E54.3 — Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device
SEMI E54.10 — Specification for Sensor/Actuator Network Specific Device Model for an In Situ Particle Monitor Device
SEMI E54.11 — Specific Device Model for Endpoint Devices
SEMI E54.18 — Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pump Device