SEMI E127 - Specification for Integrated Measurement Module Communications: Concepts, Behavior, and Services (IMMC)

The purpose of integrated measurement (metrology or inspection) is to facilitate intra-equipment process monitoring through rapid access to measurement data, reduce material handling between process and measurement equipment, and the opportunity to increase process monitoring with minimal or no decrease in throughput. The benefits of integrated measurement also allow Advanced Process Control systems to use the results with reduced feedback lag time. The purpose of the IMMC specification is to provide an object-based specification of an Integrated Measurement Module together with a standard interface between an integrated measurement module and its control and data ports where these are commonly implemented by different suppliers. The interface allows access to the properties and services of specific objects. This will facilitate the effort needed for the integration of the module into a larger system. An additional purpose of this standard is to provide sufficient information through a combination of on-line services and interface documentation that an IMMC-compliant integrated measurement module may be integrated with multi-module equipment without requiring a software change in either the module or the equipment. This may require configuration changes made by the end-user through the equipment user interface where certain options are left to the module supplier.



Subordinate Standard:

SEMI E127.1-0308 - Specification for SECS-II Protocol for Integrated Measurement Module Communications (IMMC)

　

Referenced SEMI Standards

SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E30.5 — Specification for Metrology Specific Equipment Model (MSEM)
SEMI E32 — Material Movement Management (MMM)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E39.1 — SECS-II Protocol for Object Services Standard (OSS)
SEMI E40 — Standard for Processing Management
SEMI E41 — Exception Management (EM) Standard
SEMI E42 — Recipe Management Standard: Concepts, Behavior, and Message Services
SEMI E53 — Event Reporting
SEMI E58 — Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services
SEMI E90 — Specification for Substrate Tracking
SEMI E90.1 — Provisional Specification for SECS-II Protocol Substrate Tracking
SEMI E98 — Provisional Standard for the Object-Based Equipment Model (OBEM)
SEMI E116 — Provisional Specification for Equipment Performance Tracking
SEMI E120 — Provisional Specification for the Common Equipment Model (CEM)
SEMI E148 — Specification for Time Synchronization and Definition of the Clock Object
SEMI M20 — Specification for Establishing a Wafer Coordinate System

SEMI E125 - EQUIPMENT SELF DESCRIPTION

This specification describes a method for allowing equipment suppliers to provide a description of the variables, events, exceptions, and physical equipment configuration available from their equipment. With this information available for consumption by software systems, it can be used as a tool to aid the process of integrating equipment into a factory’s automation system.

In-Scope

This Document specifies the classes that suppliers are to use to describe essential data, events, and exceptions provided by their equipment. The specification only describes the information that is static in nature (i.e., information that does not change dynamically while the equipment is running). This document also specifies an interface that clients can use to access this information.

This Specification applies to all semiconductor manufacturing equipment that supports the data acquisition interface defined in the SEMI Specification for Data Collection Management.

Out of Scope

This specification does not define any new behavior required of the equipment other than that necessary for retrieving information describing equipment configuration, interfaces, and available data, and keeping this information current.

The details of any underlying concepts and behavioral models (e.g., carrier management, process/control job, etc.) that can be described by metadata are to be separately specified in a document dedicated to those concepts. Only the ability to describe the fact that a supplier has implemented such a concept and that a client can discover this implementation and any data it can produce is in scope for this Specification.

This specification does not require that the metadata provided by the equipment be directly human-readable. It is expected that applications will be written to organize and present this information to human users in a form that is easier for end-users to digest.

Subordinate Document:

SEMI E125.1-0414 - EQUIPMENT SELF DESCRIPTION(EqSD)의 SOAP 바인딩 규격


Referenced SEMI Standards
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E39 —Object Services Standard: Concept, Behavior, and Services
SEMI E120—Specification for the Common Equipment Model (CEM)
SEMI E120.1 — XML Schema for the Common Equipment Model
SEMI E121 — Guide for Style and Usage of XML for Semiconductor Manufacturing Applications
SEMI E128 — Specification for XML Messaging
SEMI E132.1 — Specification for SOAP Binding of Equipment Client Authentication and Authorization
SEMI E138 — XML Semiconductor Common Components
SEMI E145 — Classification for Measurement Unit Symbols in XML

SEMI E118 - Specification for Wafer ID Reader Communication Interface -- The Wafer ID Reader Functional Standard: Concepts, Behavior and Service

E This standard was editorially modified in February 2005 to correct errors in Figure R2-1.

NOTICE: The designation of SEMI E118 was updated during the 1104 publishing cycle to reflect the creation of SEMI E118.1.

The purpose of the Wafer ID Reader Functional Standard is to provide a common specification for concepts, behavior, and services (functions) provided by a Wafer ID Reader to an upstream controller. A standard interface will increase the interchange-ability of Wafer ID Readers so that users and equipment suppliers have a wider range of choices.

Subordinate Standard:
SEMI E118.1-1104 - Specification for SECS-I and SECS-II Protocol for Wafer ID Reader Communication Interface Standards

Referenced SEMI Standards

SEMI E4 — SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E15 — Specification for Tool Load Port
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E47.1 — Provisional Mechanical Specification for Boxes and Pods Used to Transport and Store 300 mm Wafers
SEMI E62 — Provisional Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS)
SEMI E87 — Specification for Carrier Management (CMS)
SEMI E90 — Specification for Substrate Tracking
SEMI E99 — The Carrier ID Reader/Writer Functional Standard: Specification of Concepts, Behaviors, and Services
SEMI E101 — Provisional Guide for EFEM Functional Structure Model
SEMI T7 — Specification for Back Surface Marking of Double-Side Polished Wafers With a Two-Dimensional Matrix Code Symbol

SEMI E107 - Specification of Electric Failure LInk Data Format for Yield Management System

The objective of this Document is the standardization of the specific data format passed from the test equipment to the Yield Management System. The Yield Management System is a kind of data server for detail test data and geometrical defect data of patterns on a wafer as described in the Terminology section of this Document.

This Document assumes a Yield Management System in which test equipment electrical failure information is managed and analyzed in an integrated manner. Examples of test equipment failure information include bit map data, bin data, and inspection information obtained by devices such as wafer inspection equipment and review tools. Standardization of the data file format helps to reduce the development burden on customers and related vendors.

This document specifies the data file format for transferring from test equipment to a Yield Management System.

This document is an extension of the general map data item standard; that is, SEMI G81, and the general map data format document, currently under development. This Document does not redefine the general specification.

The scope of this Document is just defining data items and their formats. Data file creation methods, data creating environments and file naming conventions are outside of the scope of this document. Also, communication protocols to transfer the data are beyond the scope of this document.

Referenced SEMI Standards
SEMI E5 — SEMI Equipment Communication Standard 2 Message Content (SECS-II)
SEMI E30.1 — Inspection and Review Specific Equipment Model (ISEM)
SEMI G81 — Specification for Map Data Items
SEMI G85 — Specification for Map Data Format

SEMI E99 - Specification for Carrier ID Reader/Writer

The purpose of the Carrier ID Reader/Writer Functional Standard effort is to provide a common specification for concepts, behavior, and services (functions) provided by a Carrier ID Reader and a Carrier ID Reader/Writer to an upstream controller. A standard interface will increase the interchangeability of Carrier ID Reader/Writers so that users and equipment suppliers have a wider range of choices.

The Carrier ID Reader/Writer Interface Standard addresses the functional requirements for a generic Carrier ID Reader/Writer interface with an upstream controller.<br>This Specification includes required behavior and required communications for both a Carrier ID Reader and a Carrier ID Reader/Writer.<br>This The specification does not require, define, or prohibit asynchronous messages sent by the Carrier ID Reader or Reader/Writer.

Subordinate Standard

SEMI E99.1-0317 — Specification for SECS-I and SECS-II Protocol for Carrier ID Reader/Writer

　

Referenced SEMI Standards

SEMI E1.9 — Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers
SEMI E4 — SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E15 — Specification for Tool Load Port
SEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E47.1 — Mechanical Specification for FOUPS Used to Transport and Store 300 mm Wafers
SEMI E62 — Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS)
SEMI E87 — Specification for Carrier Management (CMS)

SEMI E94 - Specification for Control Job Management

This Specification describes equipment provided services to the factory that supports a high level of factory automation. These services provide capabilities for the host to coordinate processing and disposition of materials on production equipment.

This Specification may be applied to equipment that is compliant to SEMI E30 (GEM).

Subordinate Standard:

SEMI E94.1-0819 - Specification for SECS-II Protocol for Control Job Management (CJM)

Referenced SEMI Standards

SEMI E30 — Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E39 — Specification for Object Services Standard: Concepts, Behavior, and Services
SEMI E40 — Specification for Processing Management
SEMI E87 — Specification for Carrier Management (CMS)
SEMI E90 — Specification for Substrate Tracking

SEMI E90 - Specification for Substrate Tracking

The purpose of this Standard is to provide the standard services of equipment to track substrates (manufactured product) in manufacturing equipment. This Standard defines the concepts and behaviors for the information management of substrates, as well as the messages/services.

Essentially, information about substrates must be managed by the factory system, while the equipment is required to provide the services for the substrate information management. This Standard addresses the requirement for the equipment services to manage information of substrates that reside in the equipment.

The scope of this Standard is to define the information services of equipment that can be requested by the user. To clarify the required services, the concepts and behaviors of the substrate, the substrate location, the batch, and the batch location are defined.

This Standard is applicable to any manufacturing equipment that handles substrates. To implement these services, the equipment and factory system must be integrated by means of a communication link.

Subordinate Standard:

SEMI E90.1-0312 - Specification for SECS-II Protocol Substrate Tracking

Referenced SEMI Standards
SEMI E30 — Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E39 — Specification for Object Services: Concepts, Behavior, and Services
SEMI E87 — Specification for Carrier Management (CMS)