SEMI E147 - Guide for Equipment Data Acquisition (EDA)

E This standard was editorially modified in September 2007 to remove duplicate sections. Changes were made to § 6.

This guidance document provides additional information about the Equipment Data Acquisition (EDA) SEMI Standards suite, explains the relationship among those standards, and presents basic concepts for implementation to ensure the EDA specifications are properly applied.

Referenced SEMI Standards

SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)

SEMI E39 — Object Services Standard: Concepts, Behavior, and Services

SEMI E40 — Standard for Processing Management

SEMI E87 — Specification for Carrier Management (CMS)

SEMI E90 — Specification for Substrate Tracking

SEMI E94 — Specification for Control Job Management

SEMI E116 — Specification for Equipment Performance Tracking (EPT)

SEMI E120 — Specification for the Common Equipment Model (CEM)

SEMI E125 — Specification for Equipment Self Description (EqSD)

SEMI E132 — Specification for Equipment Client Authentication and Authorization

SEMI E134 — Specification for Data Collection Management (DCM)

SEMI E138 — XML Semiconductor Common Components

让我们的专家为您节省大量费用和时间，并确保成功实现SECS / GEM设备的成功

二十多年来，eInnoSys团队成员一直在设备上实施SECS / GEM和GEM300标准，并在工厂/装配体中使用它们进行自动化。我们提供完整的交钥匙解决方案，使您的设备完全符合SECS / GEM或GEM300标准。我们的领域知识和经验不仅有助于使您的实施成功，还可以大大减少集成的时间和成本。我们的解决方案随附必需的手册，SECS / GEM和GEM300符合性报告，以及供OEM提供给其工厂客户的必需日志。

SECS / GEM＆GEM300是一套用于半导体设备和工厂主机的通信协议。这些标准由SEMI维护。虽然GEM300指的是一套300mm晶圆的通信标准，远远超过200mm晶圆的通信标准，但SECS / GEM被用作200和300mm通信协议以及其他自动化标准的通用术语。

EIGEMEquipment是eInnoSys的SECS / GEM软件，它支持200mm开箱即用的大多数SECS消息。

它符合您设备的以下SEMI标准

E30 – GEM（通用设备模型）
E5 – SECS-II消息格式
E37 – HSMS（以太网）连接
E4 – SECS-I串行（RS232）连接

超轻量级产品，这意味着最需要它的控制器软件需要更多的CPU和内存

它是一个SDK（软件开发工具包），提供用于以多种语言（C＃，Java和C ++）与控制器软件集成的API。

多平台支持– Windows，Linux，Unix和Android

随附EIGEMSim – Fab Host的模拟器软件

包含SECS / GEM手册

EIGEMSim是eInnoSys的SECS / GEM软件产品，可以用作Fab主机或设备的仿真器，以进行一致性测试。

如果您已经从另一家公司购买了SECS / GEM或GEM300软件的许可证，eInnoSys仍然可以帮助您将该软件与您的控制器软件集成在一起，并从减少集成时间和成本方面受益于我们丰富的经验。

GEM300涵盖以下SEMI标准：
E30 – GEM（通用设备模型）
E39 –对象服务标准
E40 –流程作业管​​理
E87 – CMS（运营商管理规范）
E90 –基板追踪
E94 –控制作业管理
此外，工厂客户可能会要求遵循以下其他SEMI标准：
E116 – EPT（设备性能跟踪）
E157 –模块过程跟踪
E148 –时间同步

SEMI E139 - Specification for Recipe and Parameter Management (RaP)

The purpose of this specification is to specify the cooperative interaction between the factory information and control system (FICS) and the equipment to manage the specifications of equipment processing (for instance, equipment recipes).

Subordinate Standards:

SEMI E139.1-0310 — XML Schema for the RaP PDE

SEMI E139.2-1108 — SECS-II Protocol for Recipe and Parameter Management (RaP)

SEMI E139.3-1211 — XML/SOAP Binding for Recipe and Parameter Management

　

Referenced SEMI Standards

SEMI E4 — SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)

SEMI E5 — SEMI Equipment Communication Standard 2 Message Content (SECS-II)

SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)

SEMI E37 — High-Speed SECS Message Services (HSMS) Generic Services

SEMI E40 — Standard for Processing Management

SEMI E120 — Specification for the Common Equipment Module (CEM)

SEMI E121 — Guide for Style & Usage of XML for Semiconductor Manufacturing Applications

SEMI E139 — Recipe and Parameter Management (RaP)

SEMI E138 - Specification for XML Semiconductor Common Components

This Document is a central location for the definition of common XML elements that are not specific to a single standard, but common across multiple standards.

This Document defines the representation of Error, Data Types, Data Value Types, and Unit which are considered common components. The common components are used in association with other XML documents or schemas generated as part of the XML based SEMI Standard Interface Specifications.

Referenced SEMI Standards
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E87 — Specification for Carrier Management (CMS)
SEMI E121 — Guide for Style and Usage of XML for Semiconductor Manufacturing Applications
SEMI E125 — Specification for Equipment Self Description (EqSD)
SEMI E132 — Specification for Equipment Client Authentication and Authorization
SEMI E134 — Specification for Data Collection Management
SEMI E145 — Classification for Measurement Unit Symbols in XML

SEMI E134 - Specification for Data Collection Management

This specification describes a method for data acquisition consumers to request process and operational data from equipment to be communicated in an automated fashion by the equipment, or in an ad-hoc request from the consumer. It includes a mechanism for organizing related data into groups to make it more straightforward for enabling or disabling a large number of data sources and to allow consumers to organize related data into groups according to their purpose.

This specification provides a means to acquire event, exception, and trace data from semiconductor equipment through the use of a named data collection plan. This Specification defines what form a data collection plan takes, the meaning of its contents, and an interface for managing them that is to be supported by the equipment.

This specification defines the behavior associated with the execution of data collection plans in the form of finite state machines. The formats for data produced as a result of executing a data collection plan are also defined, as is the interface that must be supported by consumers of data collection plan output.

This specification defines a way for the equipment to notify consumers when the combination of activities on the equipment, including data acquisition, is causing the equipment to perform below supplier-defined criteria.

This specification defines a way for consumers to make ad-hoc on-demand requests for data from the equipment, outside of a data collection plan.

Subordinate Document:

SEMI E134.1-0414 - Specification for SOAP Binding of Data Collection Management (DCM)

Referenced SEMI Standards

SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E40 — Standard for Processing Management
SEMI E94 — Specification for Control Job Management
SEMI E120.1 — XML Schema for the Common Equipment Model
SEMI E121 — Guide for Style & Usage of XML for Semiconductor Manufacturing Applications
SEMI E125 — Specification for Equipment Self Description (EqSD)
SEMI E125.1 — Specification for SOAP Implementation of Equipment Self Description
SEMI E128 — Specification for XML Messaging
SEMI E132.1 — Specification for SOAP Implementation of Equipment Client Authentication and Authorization
SEMI E138 — XML Semiconductor Common Components