SEMI E37 - Specification for High-Speed SECS Message Services (HSMS) Generic Services

High-Speed SECS Message Services (HSMS) provides a means for independent manufacturers to produce implementations that can be connected and interoperate without requiring specific knowledge of one another.

HSMS is intended as an alternative to SEMI E4 (SECS-I) for applications where higher speed communication is needed or when a simple point-to-point topology is insufficient. SEMI E4 (SECS-I) can still be used in applications where these and other attributes of HSMS are not required.

HSMS is also intended as an alternative to SEMI E13 (SECS Message Services) for applications where TCP/IP is preferred over OSI.

It is intended that HSMS be supplemented by subsidiary standards which further specify details of its use or impose restrictions on its use in particular application domains.

HSMS defines a communication interface suitable for the exchange of messages between computers in a semiconductor factory.


Subordinate Standards:

SEMI E37.1-0819 — Specification for High-Speed SECS Message Services Single Selected-Session Mode (HSMS-SS)

SEMI E37.2-95 (Withdrawn 1109) — High-Speed SECS Message Services General Session (HSMS-GS)

SEMI E36 - Semiconductor Equipment Manufacturing Information Tagging Specification

The purpose of Semiconductor Equipment Manufacturing Information Tagging is to define a markup philosophy, a markup framework, and an information markup which is rich enough to facilitate: electronic interchange and distribution of information; quality hardcopy printing and screen display of information consistent high-precision online searching and reuse and repurposing of information for such applications as integrating source material into training material and online support applications. The intent of this document is to create an information interchange specification, not an authoring specification or an electronic presentation specification. Semiconductor Equipment Manufacturing Information Tagging will define the markup necessary for exchanging documents electronically, for facilitating retrieval of information content, and for validating information interchanges.


Subordinate Standard:

SEMI E36.1-0704 - Specification for the Semiconductor Equipment Manufacturing Information Tagging Standard E36

SEMI E32 - Material Movement Management (MMM)

This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.

The automated material movement represents a significant milestone in the evolution of automation in semiconductor manufacturing. The standardization of the transfer process is critical to the economic viability of material movement automation. This Standard addresses the communications needs of the semiconductor manufacturing facility with respect to material movement.

This Standard addresses automated material movement on the semiconductor factory floor—the task of transporting objects (material, et al.) from one processing or storage location to another. It defines the concepts of material movement, the behavior of the equipment (including transfer devices) in relation to material movement, and the messaging services which are needed to accomplish the task.

Subordinate Standard:

SEMI E32.1-0997 - SECS-II Support for Material Movement

Referenced SEMI Standards
SEMI E5 — Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E23 — Specification for Cassette Transfer Parallel I/O Interface
SEMI E30 — Specification for Generic Model for Communications and Control of SEMI Equipment (GEM)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services

SEMI E5 - Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)

The SEMI Equipment Communications Standard Part 2 (SECS-II) defines the details of the interpretation of messages exchanged between intelligent equipment and a host. This Specification has been developed in cooperation with the Japan Electronic Industry Development Association Committee 12 on Equipment Communications.

It is the intent of this Standard to be fully compatible with SEMI E4, Equipment Communications Standard (SECS-I). It is also the intent to allow for compatibility with alternative message transfer protocols. The details of the message transfer protocol requirements are contained in § 6.

It is the intent of this Standard to define messages to such a level of detail that some consistent host software may be constructed with only minimal knowledge of individual equipment. The equipment, in turn, may be constructed with only minimal knowledge of the host.

The messages defined in the Standard support the most typical activities required for IC manufacturing. The Standard also provides for the definition of equipment-specific messages to support those activities not covered by the standard messages. While certain activities can be handled by common software in the host, it is expected that equipment-specific host software may be required to support the full capabilities of the equipment.

SECS-II gives form and meaning to messages exchanged between equipment and host using a message transfer protocol, such as SECS-I.

SECS-II defines the method of conveying information between equipment and host in the form of messages. These messages are organized into categories of activities, called streams, which contain specific messages, called functions. A request for information and the corresponding data transmission is an example of such an activity.

SECS-II defines the structure of messages into entities called items and lists of items. This structure allows for a self-describing data format to guarantee proper interpretation of the message.

The interchange of messages is governed by a set of rules for handling messages called the transaction protocol. The transaction protocol places some minimum requirements on any SECS-II implementation.

Referenced SEMI Standards
SEMI E4 — SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)
SEMI E6 — Guide for Semiconductor Equipment Installation Documentation
SEMI E37 — High-Speed SECS Message Services (HSMS) Generic Services
SEMI E148 — Specification for Time Sychronization and Definition of the TS-Clock Object

SEMI E4 - Specification for SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)

This Standard provides a means for independent manufacturers to produce equipment and/or hosts that can be connected without requiring specific knowledge of each other.

The SECS-I Standard defines a communication interface suitable for the exchange of messages between semiconductor processing equipment and a host. Semiconductor processing equipment includes equipment intended for wafer manufacturing, wafer processing, process measuring, assembly, and packaging. A host is a computer or network of computers which exchange information with the equipment to accomplish manufacturing. This Standard includes the description of the physical connector, signal levels, data rate, and logical protocols required to exchange messages between the host and equipment over a serial point-to-point data path. This Standard does not define the data contained within a message. The meaning of messages must be determined through some message content standards such as SEMI E5, Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II).

　
Referenced SEMI Standards
SEMI E5 — Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E6 — Guide for Semiconductor Equipment Installation Documentation

SEMI D27 - Guide for Flat Panel Display Equipment Communication Interfaces

This is a guide for implementing equipment communication features for successful integration and automation in a flat panel display manufacturing facility.

Referenced SEMI Standards:

SEMI E4 — SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)


SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)


SEMI E23 — Specification for Cassette Transfer Parallel I/O Interface


SEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)


SEMI E37 — High-Speed SECS Message Services (HSMS), Generic Services


SEMI E37.1 — High-Speed SECS Message Services, Single-Session Mode (HSMS-SS)