SEMI E54.24 - Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Networked Sensor (GENsen)

This Specification is part of a suite of Standards that specify the implementation of SEMI Standards for the Sensor/Actuator Network. The specific purpose of this specification is to describe a network-independent application model of a generic sensor device measuring one or more phenomena on a piece of semiconductor manufacturing equipment and communicating over a sensor/actuator communication network. Oftentimes such sensors are added onto the equipment as they might provide a capability that is not provided with the current equipment configuration.

This document describes a specific device structure and behavior of a generic equipment networked sensor. This could include a sensor added onto the equipment that communicates over a sensor/actuator communication network. It could also include a sensor that is part of the default configuration of the equipment, communicating over a sensor/actuator communication network.

This Document is applicable to sensors that are regarded as data producers only. A configuration or control of the sensor device (e.g., described by a third entity) is outside the scope of this Standard.

This document does not define terms that have been defined already in other referenced documents.

Referenced SEMI Standards
SEMI E39 — Object Services Standard
SEMI E54 — Specification for Sensor/Actuator Network
SEMI E54.1 — Specification for Sensor/Actuator Network Common Device Model
SEMI E90 — Specification for Substrate Tracking

SEMI E54.23 - Specification for Sensor/Actuator Network Communications for CC-Link IE Field Network

his Specification is part of the SEMI Sensor/Actuator Network (SAN) suite of Standards and defines a specific communications protocol based on the CC-LinkTM IE Field Network standard. This Network Communication Standard (NCS) taken together with the SEMI Sensor/Actuator Network Standard suite and the CC-Link IE Field Network standard completely and unambiguously defines an open standard providing an industry specific solution to off-the-shelf interoperability of networked devices in semiconductor manufacturing equipment.


CC-Link IE Field Network is a vendor independent, open device level network standard. Vendor independence and openness are guaranteed by the CC-Link Partner Association.

This Document specifies a SAN communications standard based on the CC-Link IE Field Network specification that is in compliance with SEMI E54.1. As such, it specifies the protocol, services and behavior that compliant intelligent devices must support in order to interchange information over this SAN in a method compatible with SEMI E39.

In conjunction with a SEMI Standard SAN Common Device Model (CDM) specification and one or more SEMI Standard-Specific Device Model (SDM) Specifications (e.g., for a mass flow controller), this Network Communication Standard (NCS) with the related CC-Link IE Field Network standard describe the data structures, interactions and behavior that are characteristic of the various devices on the network. This composite model forms a complete interoperability standard for communications among intelligent sensors, actuators and controllers in semiconductor manufacturing equipment.

　
Referenced SEMI Standards
SEMI E39 — Specification for Object Services: Concepts, Behavior, and Services
SEMI E54.1 — Specification for Sensor/Actuator Network Common Device Model
SEMI E54.3 — Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device
SEMI E54.10 — Specification for Sensor/Actuator Network Specific Device Model for an In Situ Particle Monitor Device
SEMI E54.11 — Specific Device Model for Endpoint Devices
SEMI E54.18 — Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pump Device

SEMI E53 - Event Reporting

Access to process data in equipment is crucial for effective process monitoring and control in a semiconductor manufacturing facility. This standard addresses the communication needs of semiconductor equipment and other factory objects, such as cell controllers or recipe servers, with respect to the timely collection and reporting of such data. The purpose of this standard is to provide a general-purpose set of event reporting services that may be offered by equipment suppliers. This document may be referenced, in whole or in part, by other standards addressing higher-level application domains. The communications services defined here will enable the standards-based interoperability of independent systems. They shall allow application software to be developed which can assume the existence of these services and allow software products to be developed which offer them.

Subordinate Standard:

SEMI E53.1-0704 - SECS-II Support for Event Reporting Standard

Referenced SEMI Standards
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)
SEMI E38 — Cluster Tool Module Communications (CTMC)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E39.1 — SECS-II Protocol for Object Services Standard (OSS)
SEMI E40 — Standard for Processing Management

SEMI E42 - Recipe Management Standard: Concepts, Behavior, and Message Services

E This standard was editorially modified in September 1999 to conform to its non-provisional status. Changes were made to Section 1.2.

This standard defines the concepts required for the management of recipes, the operations or behavior provided by the Recipe Management Standard (RMS), and the messages through which services are provided through an interface between the provider and the user of these services. The purpose of this standard is twofold: to enable applications software to be developed that can assume the existence of standard concepts, behaviors, and message services that collectively form Recipe Management and that take advantage of them; and to enable the software to be developed to offer the Recipe Management capabilities.

Subordinate Standard:

SEMI E42.1-0704 — Standard for SECS-II Protocol for Recipe Management Standard (RMS)

Referenced SEMI Standards
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E10 — Standard for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM)
SEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E42 — Recipe Management Standard: Concepts, Behavior, and Message Services
SEMI E53 — Event Reporting

SEMI E41 - Exception Management (EM) Standard

Interactive exception handling enhances the error recovery ability while maintaining automated control in the factory. This standard addresses the communications needs within the semiconductor manufacturing environment with respect to equipment exception handling. This standard specifies capabilities to be provided by the exception agent for effective reporting and interaction with respect to abnormal situations in the equipment. It describes the concept of exception management, the behavior of the equipment in relation to interactive exception handling, and the messaging services which are needed to provide the functionality. The communications services defined here will enable the standards-based interoperability of independent systems. They shall allow application software to be developed which can assume the existence of these services and allow software products to be developed which offer them. Implementation of automated exception management will help reduce error recovery time and avoid changing from automatic to manual equipment control in many situations. The adoption of the standards described will greatly reduce the effort required to integrate compliant equipment components. Compliance requires a specific set of standard services.


Subordinate Standard:
SEMI E41.1-0996 — SECS-II Support for the Exception Management Standard

Referenced SEMI Standards
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)

SEMI E40 - Specification for Processing Management

Automated management and command of material processing in equipment is a crucial aspect enabling factory automation. This Standard addresses the communications needs within the semiconductor manufacturing environment with respect to the processing of material in equipment.

This Standard specifies the application of the appropriate processing to specified material received at the processing agent. It describes the concepts of material processing, the behavior of the equipment in relation to processing, and the messaging services which are needed to accomplish the task.

The communications services defined here enable standards-based interoperability of independent systems. They allow application software to be developed that can assume the existence of these services and allow software products to be developed which offer them.

Implementation of automated processing management will help eliminate the misprocessing of material. The adoption of the standards described will greatly reduce the effort required to integrate compliant equipment components and reduce time to set up for processing. Compliance requires a minimal but specific set of standard services.

The scope of this Standard is automated material processing based on discrete processing jobs. It provides the functionality required for process management for modules within a cluster tool. It may be applied to sub-systems of other multi-resource equipment, as well as to host control of many types of equipment.

This Standard supports individual management of jobs for identical processing of material within a group and concurrent processing of independent groups. Where material contains other material (such as carriers containing wafers), processing may be specified in terms of either material type.

A simple tuning mechanism is provided for limited feedforward and feedback control between process steps. A method is defined as taking advantage of recipe variable parameters. This is not expected to satisfy all closed-loop control requirements. Other mechanisms are anticipated with greater flexibility for late tuning and handling complex data.

This Standard does not provide services for receiving material for processing or disposing of it after processing is complete. Automation of material transfer is assumed to be provided through other services, such as those defined in applicable SEMI Standards.

This Standard presents a solution from the concepts and behavior down to the messaging services. It does not define the messaging protocol.

A messaging service includes the identification that a message shall be exchanged and a definition of the data which is contained in that message. It does not include information on the structure of the message, how the data is represented within the message, or how the message is exchanged. This additional information is contained within the message protocol.

The defined services may be applied to multiple protocols. Information on the mapping of processing management services to special protocols (e.g., SECS-II) are added as adjunct standards.

The services assume a communications environment in which a reliable connection has been established between the user of the services and the provider of the services. Establishing, maintaining, releasing a connection, and handling communication failures are beyond the scope of this Standard.

Subordinate Standard:

SEMI E40.1-1218 — Specification for SECS-II Support for Processing Management

Referenced SEMI Standards
SEMI E5 — Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E30 — Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E39 — Specification for Object Services: Concepts, Behavior, and Services

SEMI E39 - Specification for Object Services: Concepts, Behavior, and Services

The purpose of the Object Services Standard (OSS) is to provide general terminology, conventions, and notation for describing behavior and data in terms of objects and object attributes. In addition, it provides basic services for reading object attributes, setting their values, and for asking for an object’s contents. This Standard is intended to be referenced by other Standards that define specific objects to reduce redundancy.


The scope of this Standard is to provide concepts, behavior, and services common to a variety of public objects.

Object models are common to multiple Standards. Object Services provide basic object-related definitions, and basic services for getting object attributes and setting attribute values, that can be used by all Standards defining public objects. These services allow the basic management of data based on objects.

The object services defined in this document may be included in the services provided by other Standards. They may also be provided independently of such other Standards.


Subordinate Standard (included):

SEMI E39.1-1218 — Specification for SECS-II Protocol for Object Services (OSS)

Referenced SEMI Standards
SEMI E5 — Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)