Which companies provide turnkey SECS/GEM integration solutions?

The semiconductor industry thrives on precision, connectivity, and automation. To ensure seamless communication between manufacturing equipment and factory host systems, the SECS/GEM protocol has become a global standard. However, integrating SECS/GEM into new or legacy equipment can be complex. That’s why many equipment makers and fabs turn to companies that offer turnkey SECS/GEM integration solutions—complete packages covering design, development, deployment, and support.

In this post, we’ll explore leading companies providing turnkey SECS/GEM integration and what makes them stand out.

Why Turnkey SECS/GEM Integration Matters

SECS/GEM integration is not just about software. It requires deep knowledge of SEMI standards, equipment automation, and host communication. A turnkey solution means:

• Faster time-to-market for OEMs launching new tools.
• Upgrades for legacy equipment without native GEM support.
• Compliance with SEMI standards like E4, E5, E30, and GEM300.
• Reduced risk through pre-built libraries, SDKs, and tested frameworks.

Leading Companies Offering Turnkey SECS/GEM Integration

1) eInnoSys

At eInnoSys, SECS/GEM integration is a specialty. Their products include EIGEMBox (a patented plug-and-play SECS/GEM box for legacy equipment), SDKs, and complete integration services. This makes them ideal for fabs and OEMs that need to bring non-GEM equipment into compliance or accelerate automation projects.

Key Strengths:

• Unique hardware/software solution for legacy equipment
• SDKs and development tools for new equipment
• Expertise in Fab/Assembly automation and AI/ML-driven solutions

For Fabs & Assembly/Test/Packaging

Products:

• SECS/GEM addition & enhancement on legacy equipment - EIGEMBox & EIGEM-HMI

• E84 & E87 addition on legacy equipment - EIGEMBox

• AI/ML based health monitoring & predictive maintenance - XPump

• Factory host - EIStationController

• Recipe Management System - EIRMS

• AI/ML based Smart FDC with Predictive Analytics - SeerSight

• Analog Gauge Monitoring - EIGaugeMonitor

• Equipment Simulator - EIGEMSim

• Factory host SDK - EIGEMHost & EIGEM300Host

• Chemical Management - EIBarcodeGuardian

• Spare Parts & Vendor Management - EICMMS

Services:

• Contract automation engineers - Experts in MES, SECS/GEM, FDC, etc.

• Automation Roadmap Preparation/Review

• Backup support for MES, Factory host, FDC, etc.

• Cycle Time & OEE improvement custom projects

• MES integration with Equipment or MRP

• MES workflows, integration, migration, etc.

For OEMs

Products:

• SECS/GEM addition to equipment - EIGEMEquipment & EIGEM-HMI

• GEM300 addition to equipment - EIGEM300Equipment

• Factory Host simulator - EIGEMSim

• E84 Hardware & SDK - EIGEM84

Services:

• Equipment Controller software development & maintenance

• Experienced Equipment Software Engineers on Contract

• Support for SECS/GEM or Equipment software

2. Cimetrix (Now Part of PDF Solutions)

Cimetrix has long been recognized as a leader in SECS/GEM integration. Its flagship product, CIMConnect, provides OEMs with an out-of-the-box framework to develop compliant SECS/GEM interfaces. Known for reliability and robust documentation, Cimetrix is trusted by many fabs and equipment makers worldwide.

3. ErgoTech / TransSECS

ErgoTech’s TransSECS platform is another well-known SECS/GEM solution. Designed for flexibility, it allows OEMs to quickly build SECS/GEM interfaces using an interface builder. It’s particularly useful for those who want more control over their integration while leveraging a ready-to-use framework.

4. Focussia

Focussia provides full end-to-end SECS/GEM services—from consultation and software development to testing and post-deployment support. They work with both OEMs and fabs to deliver customized solutions that ensure compliance and long-term maintainability.

The journey toward semiconductor equipment automation requires a trusted partner who understands the intricacies of the SECS/GEM protocol. Whether you’re an OEM bringing new equipment to market or a fab upgrading legacy tools, turnkey SECS/GEM integration solutions save time, reduce risk, and ensure compliance with industry standards.

With providers like Einnosys Cimetrix, ErgoTech, Focussia companies can choose the right fit for their needs—accelerating the move toward smarter, more connected fabs.

SECS/GEM message exchange equipment and SECS/GEM message exchange method

The invention relates to the technical field of automation control in the semiconductor manufacturing process and particularly relates to a piece of SECS/GEM message exchange equipment which is used in communication between semiconductor equipment and a host. The SECS/GEM message exchange equipment comprises a configuration file manager, an equipment-end SECS/GEM driver, an equipment message buffer, a host-end SECS/GEM driver, a host message buffer and a transponder. The invention further relates to a SECS/GEM message exchange method. By the adoption of the equipment and the method of the invention, one piece of semiconductor equipment can be connected with a plurality of hosts and is enabled to simultaneously communicate with a plurality of hosts, thus increasing the message exchange rate and improving the production efficiency; effective decoupling can be carried out in the case of a plurality of upper systems, which enables the coupling degree of the systems to be the minimum and facilitates system maintenance; and the pressure of an EAP system is reduced and the time delay of the upper systems in data receiving is shortened.

SECS/GEM message equipment and method

Technical field

The present invention relates to the technical field of automatic control in semiconductor fabrication, relate in particular to communicating by letter between semiconductor equipment and mainframe, a kind of SECS(Semiconductor Equipment Communication Standard specifically, semiconductor equipment communication standard)/GEM(Generic Equipment Model, common apparatus model) message equipment and method.

Background technology

SECS/GEM, HSMS(High-speed SECS Message System, high-speed SECS message system) be by SEMI(Semiconductor Equipment and Materials Institute, semiconductor equipment and materials association) the Semicon industry communication standard protocol formulated, most semiconductor equipments are all in accordance with this agreement at present, operate in the EAP(Equipment Automation Program on the mainframe (Host), equipment automatization program) system communicates by this agreement and equipment, realize and revise device parameter, assign instruction, etc., thereby control appliance operation, also can collect metric data, equipment alarm, etc.

But common CIM(Computer Integrated Manufacturing, computer integrated manufacturing system) upper system (as FDC, APC, SPC, RMS, MES, etc.) need to collect a large amount of real-time data from equipment, but due to SECS, HSMS is a point-to-point communication protocol, so the current scheme is to be all connected to collect data with semiconductor equipment by EAP system substantially, and reports and submits to the upper system, there is following defect in this scheme:

1 - EAP system pressure is very large, may cause system operation slowly, thereby impact is produced;

2 - the data delay that upper system is received, has a certain risk to production;

3 - all upper systems all depend on EAP system, and when the EAP system breaks down, all upper systems all cannot be worked;

4 - because all upper systems all depend on EAP system, the height between this system is coupled and makes troubles to system maintenance

5 - for some early-stage FAB(wafer factories), may cannot find the source code of EAP, EAP is as same camera bellows, cannot revise, but owing to being point-to-point communication, the equipment can only be communicated by letter with a peripheral system, if increase new upper system (as FDC, etc.), almost cannot realize.