Friday, May 29, 2020

SEMI E132 - Specification for Equipment Client Authentication and Authorization

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The authorization scheme specified in this Standard allows equipment vendor the flexibility to provide access control at any level of gran...
Thursday, May 28, 2020

SEMI E128 - Specification for XML Message Structures

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The XML Messaging Specification provides definitions of message headers needed for messages exchanged in an asynchronous or synchronous fas...
Wednesday, May 27, 2020

SEMI E127 - Specification for Integrated Measurement Module Communications: Concepts, Behavior, and Services (IMMC)

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The purpose of integrated measurement (metrology or inspection) is to facilitate intra-equipment process monitoring through rapid access to...
Tuesday, May 26, 2020

SEMI E125 - EQUIPMENT SELF DESCRIPTION

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This specification describes a method for allowing equipment suppliers to provide a description of the variables, events, exceptions, and p...
Monday, May 25, 2020

SEMI E118 - Specification for Wafer ID Reader Communication Interface -- The Wafer ID Reader Functional Standard: Concepts, Behavior and Service

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E This standard was editorially modified in February 2005 to correct errors in Figure R2-1. NOTICE: The designation of SEMI E118 was upda...
Saturday, May 23, 2020

SEMI E107 - Specification of Electric Failure LInk Data Format for Yield Management System

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The objective of this Document is the standardization of the specific data format passed from the test equipment to the Yield Management Sy...
Thursday, May 21, 2020

SEMI E99 - Specification for Carrier ID Reader/Writer

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The purpose of the Carrier ID Reader/Writer Functional Standard effort is to provide a common specification for concepts, behavior, and se...